Low Damage Etching of GaN Surfaces via Bias-Assisted Photoenhanced Electrochemical Oxidation in Deionized Water
نویسندگان
چکیده
منابع مشابه
Low Damage Etching of GaN Surfaces via Bias-Assisted Photoenhanced Electrochemical Oxidation in Deionized Water
Properties of GaN surfaces etched by bias-assisted photoenhanced electrochemical (PEC) oxidation in deionized water and subsequent removal of the oxidized material are investigated using Schottky diodes fabricated on etched surfaces. It is demonstrated that with a short anneal at 700 C after removal of the oxide, it is possible to obtain a low damage surface with near ideal breakdown and capaci...
متن کاملSurface Morphology and Formation of Nanostructured Porous GaN by UV-assisted Electrochemical Etching
This article reports on the studies of porous GaN prepared by ultra-violet (UV) assisted electrochemical etching in a solution of 4:1:1 HF: CH3OH:H2O2 under illumination of an UV lamp with 500 W power for 10, 25 and 35 minutes. The optical properties of porous GaN sample were compared to the corresponding as grown GaN. Porosity induced photoluminescence (PL) intensity enhancement was found in t...
متن کاملSynthesis Porous GaN by Using UV-assisted Electrochemical Etching and Its Optical Studies
The PL of porous GaN sample shows higher intensity with smaller FWHM and red-shifting relative to the as-grown sample. The energy gap for porous GaN sample was smaller compare to the as-grown sample. The SEM surface image of UV-assisted electrochemical etching process is shown a shape and size of pore which was formed on the surface of the GaN, therefore the shape of pores formed was in spheric...
متن کاملMetal-assisted chemical etching of Ge(100) surfaces in water toward nanoscale patterning
We propose the metal-assisted chemical etching of Ge surfaces in water mediated by dissolved oxygen molecules (O2). First, we demonstrate that Ge surfaces around deposited metallic particles (Ag and Pt) are preferentially etched in water. When a Ge(100) surface is used, most etch pits are in the shape of inverted pyramids. The mechanism of this anisotropic etching is proposed to be the enhanced...
متن کاملChloride-assisted catalytic water oxidation.
Rates of electrocatalytic water oxidation to oxygen by Ru(II) polypyridyl complexes are enhanced by added NaCl. Observations based on the single-site catalyst [Ru(II)(Mebimpy)(bpy)(OH2)](2+) (Mebimpy is 2,6-bis(1-methylbenzimidazol-2-yl)pyridine; bpy is 2,2'-bipyridine) at pH 7.0 in a phosphate buffer suggest a mechanism involving initial oxidation of the catalyst to Ru(V)(O)(3+) followed by Cl...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Electronic Materials
سال: 2007
ISSN: 0361-5235,1543-186X
DOI: 10.1007/s11664-006-0009-0